| 摘要 |
PROBLEM TO BE SOLVED: To solve the problem that when size of a substrate becomes larger, speed of a substrate marginal part at the time of rotating becomes much larger than hitherto and thereby when the substrate leans at the time of application, a coating liquid is biassed and a coating film of uniform thickness cannot be obtained. SOLUTION: After coating treatment in which an inner cup and a lid body for the inner cup are integrally rotated in a state where a roller is separated from a notch is performed, rotation is stopped, the roller is engaged to the notch by rocking a rocking arm, rotation of the lid body for the inner cup is stopped and then a lid body unit is raised from a cup unit. Thereafter an inner cup upper surface is again closed by the lid body for the inner cup, rotary coating is performed and then the lid body for the inner cup is engaged to the inner cup again. COPYRIGHT: (C)2004,JPO&NCIPI
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