| 摘要 |
PROBLEM TO BE SOLVED: To provide a spin coating apparatus capable of preventing a coating solution from turning around to the rear face of a rectangular substrate at the time of applying the coating solution to the rectangular substrate. SOLUTION: The spin coating apparatus is provided with members 7 for preventing the coating solution from turning around to the rear side, adjacently to the edge parts of entire longer sides of a rectangular substrate 14 attracted and held on the top face of a spinning table 2, and which is installed on the inner face of the bottom of a spinning cup in such a manner that each of the members 7 has a slanting face slanting toward the edge part of the entire longer side of the rectangular substrate and the slanting top end A is kept higher than the upper face of the rectangular substrate and the slanting lower end B is kept lower than the undersurface of the rectangular substrate. The members for preventing turning around is members installed on a frame board 8 each with a size corresponding to the size of the rectangular substrate. COPYRIGHT: (C)2004,JPO&NCIPI
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