METHOD FOR PLASMA STERILIZATION TREATMENT

摘要

PROBLEM TO BE SOLVED: To secure advanced sterilization treatment which is easily handled. SOLUTION: After vacuuming up the inside of a chamber 3 in which a matter to be sterilized 5 is installed, gaseous oxygen containing ozone is supplied as a supply gas. Then, while keeping the inside of the chamber 3 to be in a prescribed vacuum state, plasma is generated in the chamber to perform the sterilization treatment to the matter to be sterilized 5. COPYRIGHT: (C)2004,JPO&NCIPI