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发明名称
Halbleiterbauelement mit einem Aggregat von Mikro-Nadeln aus Halbleitermaterial
摘要
申请公布号
DE69433727(T2)
申请公布日期
2004.09.30
申请号
DE1994633727T
申请日期
1994.11.02
申请人
MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD.
发明人
ERIGUCHI, KOJI;KUBOTA, MASAFUMI;NIWA, MASAAKI;NOMURA, NOBORU
分类号
B81B3/00;G01Q70/10;G01Q70/16;G02B6/12;G02B6/124;G11C23/00;H01H1/00;H01L21/308;H01L31/0352;H01L31/18;H01L33/10;H01L33/18;(IPC1-7):H01L33/00;H01L31/153;H01L27/15;H01L31/173;H01L21/30
主分类号
B81B3/00
代理机构
代理人
主权项
地址
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