| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a substrate carrying apparatus that carries a square substrate placed on a support arm while being aligned with high accuracy. <P>SOLUTION: Four placing parts 41 to 44 for supporting each corner of the substrate G are provided to a support arm 31 whose inner edge is configured to be arcuate. One of the placing parts is configured to be a restriction placing part 5 for supporting a C face C1 of a first corner S1 of the substrate and restricting the corner S1 in press contact with end faces of two sides sandwiching the corner S1. The other placing parts are configured as tilt placing parts 6 each provided with a first tilt face 61 for guiding end edges of two sides sandwiching C faces C2 to C4 of the other corners of the substrate downward and tilted downward toward the inner side of the support arm 31. When the substrate is delivered to the support arm 31, the corners S2 to S4 placed on the tilt placing parts 6 are guided along the tilt face, and the corner S1 is pressed into contact with the restriction placing part 5. Thus, the substrate is placed on the support arm 31 in an aligned state. <P>COPYRIGHT: (C)2004,JPO&NCIPI |
