Developer dispensing nozzle with movable shutter plates

摘要

A liquid dispensing nozzle beneficial in varying or controlling the quantity of a developing liquid dispensed onto various regions of a semiconductor wafer substrate during the photolithography step of semiconductor fabrication is disclosed. The liquid dispensing nozzle includes a nozzle housing which includes a bottom dispensing opening. A shutter plate in the nozzle housing is engaged by a shutter motor which displaces the shutter plate in the nozzle head and varies the position of the shutter plate with respect to the dispensing opening. The shutter plate opening narrows as the developing liquid is dispensed onto the edge of the substrate to prevent excessive application of the liquid onto those regions. The shutter plate widens the opening as the developing liquid is dispensed onto the central region of the substrate.