发明名称 Method for producing laser with resonant reflector
摘要 In one exemplary embodiment of the invention, a method is employed that is directed to forming a resonant reflector on an optoelectronic device, such as a semiconductor laser for example. The exemplary method involves depositing a first material layer on the top layer of the optoelectronic device, where the first material layer having a refractive index and a thickness of about an odd multiple of a quarter of a wavelength to which the optoelectronic device is tuned. A patterned region is then created that extends at least partially into the first material layer. Selected patterned regions are at least partially filled with a second material that has a refractive index that is greater than the refractive index of the first material layer. Finally, a third layer, having a refractive index greater than the refractive index of the first material layer, is deposited immediately adjacent the first material layer.
申请公布号 US2004191941(A1) 申请公布日期 2004.09.30
申请号 US20040819654 申请日期 2004.04.07
申请人 发明人 MORGAN ROBERT A.;MTRZELECKI EVA
分类号 H01S5/028;H01S5/183;(IPC1-7):H01L21/00 主分类号 H01S5/028
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