| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a solid shape evaluation apparatus capable of nondestructively and speedily evaluating the shape of a sample even in the case that the sample has a complicated solid shape. <P>SOLUTION: The solid shape evaluation apparatus evaluates the sample by creating data indicating the solid shape of the sample from a plurality of cross-sectional images acquired by an X-ray CT scanner device and comparing the data with data indicating the solid shape of the sample created by CAD etc. In the data comparison, image deviations of an observed image from a design image of each cross section are computed through the use of a cross-sectional image of a reference surface P, and image deviations of observed data are corrected through the use of the results of computation A reference piece Q having the shape of a right angled triangle in a plan view is embedded in a rotating table 211 of the X-ray CT scanner device. By matching a cross-sectional image of the reference piece Q with the cross-sectional image of the reference surface, it is possible to correct image deviations of even the sample P having a complicated solid shape but no reference surface S and satisfactorily perform shapes evaluation. <P>COPYRIGHT: (C)2004,JPO&NCIPI |
