发明名称 PARTICLE-OPTICAL DEVICE FOR IRRADIATING OBJECT
摘要 PROBLEM TO BE SOLVED: To enable implementation of a smart disk by a simple system and at a low manufacturing cost, improving safety. SOLUTION: The device comprises control means and at least one combination 23, 30 of a piezo-electric position actuator 25 and a piezo-electric force sensor 35. The actuator and sensor are positioned in series, whereby the control means generates a control signal for at least that actuator associated with the sensor, based on at least one input signal from at least one sensor. The series-positioned actuators and sensors of at least one combination are positioned between the housing and the reference body. The support of the reference body against the supporting portion of the housing occurs via the at least one combination. COPYRIGHT: (C)2004,JPO&NCIPI
申请公布号 JP2004273459(A) 申请公布日期 2004.09.30
申请号 JP20040065811 申请日期 2004.03.09
申请人 FEI CO 发明人 VISSCHER ALBERT
分类号 G21K5/00;G21K5/04;H01J37/16;H01J37/20;(IPC1-7):H01J37/20 主分类号 G21K5/00
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