摘要 |
PROBLEM TO BE SOLVED: To provide a washing method for a glass substrate for a DNA chip to provide an excellent signal from the DNA chip. SOLUTION: The substrate G for the DNA chip is arranged inside an atmospheric plasma generator for generating atmospheric plasma between a high voltage electrode 1 and a low voltage electrode 2 to treat a treated object by the atmospheric plasma, and a surface of the substrate G is washed by the atmospheric plasma generated in the generator. COPYRIGHT: (C)2004,JPO&NCIPI
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