| 发明名称 |
POLYMERS, METHODS OF USE THEREOF, AND METHODS OF DECOMPOSITION THEREOF |
| 摘要 |
Polymers, methods of use thereof, and methods of decomposition thereof, are provided. One exemplary polymer, among others, includes, a photodefinable polymer having a sacrificial polymer and a photoinitiator. |
| 申请公布号 |
WO2004036264(A3) |
申请公布日期 |
2004.09.30 |
| 申请号 |
WO2003US32918 |
申请日期 |
2003.10.16 |
| 申请人 |
GEORGIA TECH RESEARCH CORPORATION |
发明人 |
KOHL, PAUL, A.;ALLEN, SUEANN, BIDSTRUP;WU, XIAOQUN;HENDERSON, CLIFFORD, LEE |
| 分类号 |
B81C1/00;C08J3/28;C08K5/00;G03F7/40 |
主分类号 |
B81C1/00 |
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