VIA/LINE INDUCTOR ON SEMICONDUCTOR MATERIAL

摘要

A spiral inductor Ä122Ü, and manufacturing method therefore, is provided including a substrate Ä112Ü and an inductor dielectric layer Ä114Ü over the substrate Ä112Ü having a spiral opening provided therein. A spiral inductor Ä122Ü is in the spiral opening with the spiral inductor Ä122Ü including a plurality of parallel spiral vias Ä144Ü Ä148Ü connected together at center proximate and center distal ends of the spiral inductor Ä122Ü.