| 摘要 |
PROBLEM TO BE SOLVED: To reduce power consumption of a gas laser oscillator by providing a heat exchanger between a plurality of discharge spaces thereby reducing gas flow rate. SOLUTION: Even if a discharge space 5 is heated by injecting discharge energy to the heat saturation limit, discharge energy can be applied to a laser medium again in a discharge space 6 by cooling the laser medium through a heat exchanger 13. Consequently, gas flow rate per injection power can be reduced and power consumption of the gas laser oscillator can be reduced. COPYRIGHT: (C)2004,JPO&NCIPI |
