SEMICONDUCTOR WAFER HOUSING CONTAINER

摘要

PROBLEM TO BE SOLVED: To maintain the inside of a semiconductor wafer housing container in a clean atmosphere by preventing the infiltration of dust-containing eddy of the outside air into the housing section of the container. SOLUTION: In the semiconductor wafer housing container 110a of a mini environment type semiconductor manufacturing device, a flange 100 perpendicularly protruded from the outer peripheral end edge section of a lid fitting section 74 to which a lid 75 is fitted is connected and fixed to the outside end edge sections of many ribs 101 protruded from the outer peripheral surface of the lid fitting section 74 at intervals. In addition, the outside end section of a flat annular vane piece 111 having a width is perpendicularly connected and fixed to the outer peripheral projecting edge section of the flange 100 along the flowing direction of clean air. COPYRIGHT: (C)2004,JPO&NCIPI