MANUFACTURING METHOD AND PREPARING APPARATUS FOR MICROSTRUCTURE

摘要

PROBLEM TO BE SOLVED: To manufacture microstructures, such as good-quality quantum dot structures, without masks by freely controlling the positions and sizes of projecting parts of the microstructures. SOLUTION: The method for manufacturing the microstructures comprises irradiating the surface of a substrate material (3) with an electron beam (2) while passing gas containing elements which are raw materials for the projecting parts, at the time of manufacturing the microstructures by depositing the projecting parts on the substrate material; depositing the raw materials of the projecting parts by the reaction of the gas containing elements which are the raw materials for the projecting parts with the electron beam (2) in the form of dots on the substrate material (3); and forming the projecting parts of arbitrary shapes by moving the positions on the substrate material (3) irradiated with the electron beam (2). A magnetic flux of≤0.5 to≥2 teslas is impressed near to the substrate material to limit the spread of the electron beam and the surface of the substrate material (3) is irradiated with the electron beam. COPYRIGHT: (C)2004,JPO&NCIPI