| 摘要 |
PROBLEM TO BE SOLVED: To provide a lapping device for providing desired surface roughness in response to an abrasive grain state of a lapping film surface. SOLUTION: This lapping device has a rotational driving means 20 for rotatably holding a work W, a lapping film 1 for arranging an abrasive grain on one surface of a nonexpansible and deformable thin base material, a shoe 2 for pressing an abrasive grain surface of the lapping film 1 to the work W rotated by the rotational driving means 20, a motor M<SB>3</SB>for sending out the lapping film when stopping lapping, a roughness measuring apparatus 4 and a roughness measuring apparatus body 40 for detecting a surface state of the lapping film 1, and a control part C for controlling at least one of pressing force of the shoe 2 in working and sending-out quantity of the lapping film 1 when stopping the lapping. COPYRIGHT: (C)2004,JPO&NCIPI |
