| 摘要 |
PROBLEM TO BE SOLVED: To provide a thermostatic vacuum container capable of more effectively preventing an object from temperature changes which may be generated by an exhaust or exchange of the stored object or the like under a pressure-reduced or vacuum environment, and an exposure device utilizing the thermostatic vacuum container. SOLUTION: The thermostatic vacuum container for storing the object and maintaining the temperature of the object at a fixed level under the pressure-reduced or vacuum environment is characterised by having a temperature control plate arranged at least on a part of space in the vacuum container, and a temperature control mechanism for controlling the temperature of the temperature control plate. COPYRIGHT: (C)2004,JPO&NCIPI
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