发明名称 COMPRESSION METHOD, COMPRESSION DEVICE, AND PROCESS AND SYSTEM FOR MANUFACTURING ELECTROOPTIC DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a compression method and a compression device capable of increasing an emergence thrust easily, and to provide a process and a system for manufacturing an electrooptic device. SOLUTION: A compression head 100 has a mechanism 60 for regulating the weight thereof. The weight regulating mechanism 60 is a weight which can be attached removably to the body of the compression head 100. COPYRIGHT: (C)2004,JPO&NCIPI
申请公布号 JP2004273687(A) 申请公布日期 2004.09.30
申请号 JP20030061351 申请日期 2003.03.07
申请人 SEIKO EPSON CORP 发明人 HARAYAMA KAZUYUKI
分类号 H01L21/60;H01L21/603;(IPC1-7):H01L21/60 主分类号 H01L21/60
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