发明名称 |
COMPRESSION METHOD, COMPRESSION DEVICE, AND PROCESS AND SYSTEM FOR MANUFACTURING ELECTROOPTIC DEVICE |
摘要 |
PROBLEM TO BE SOLVED: To provide a compression method and a compression device capable of increasing an emergence thrust easily, and to provide a process and a system for manufacturing an electrooptic device. SOLUTION: A compression head 100 has a mechanism 60 for regulating the weight thereof. The weight regulating mechanism 60 is a weight which can be attached removably to the body of the compression head 100. COPYRIGHT: (C)2004,JPO&NCIPI
|
申请公布号 |
JP2004273687(A) |
申请公布日期 |
2004.09.30 |
申请号 |
JP20030061351 |
申请日期 |
2003.03.07 |
申请人 |
SEIKO EPSON CORP |
发明人 |
HARAYAMA KAZUYUKI |
分类号 |
H01L21/60;H01L21/603;(IPC1-7):H01L21/60 |
主分类号 |
H01L21/60 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|