LASER BEAM UNIFORM RADIATION OPTICAL SYSTEM

摘要

PROBLEM TO BE SOLVED: To provide an optical system for forming an irradiating beam having uniform intensity distribution on an irradiation surface by superposing split beams obtained by splitting a laser beam in a state where an interference between the beams is reduced. SOLUTION: The laser beam uniform radiation optical system is constituted of a waveguide for spatially splitting the laser beam from a laser beam source into the split beams on a beam cross section, a superposing lens for superposing the split beams on the irradiation surface and radiating the superposed beam, and a delay plate for uniformizing the intensity of the beam on the irradiation surface. The delay plate delays either of the adjacent split beams adjacent each other out of the split beams more than the other by longer than the temporal coherent distance of the laser beam, and a plurality of split beams out of the split beams have the same phase without delaying each other. COPYRIGHT: (C)2004,JPO&NCIPI