| 摘要 |
PROBLEM TO BE SOLVED: To precisely measure displacement of a gear 2 itself or a magnetic body comprising a gear-like irregularity. SOLUTION: Each pair of elements among a plurality of pairs of impedance elements to which an AC voltage is applied is arrayed with an interval along the row of teeth of a magnetic body comprising such row of teeth as gear pitch. The impedance of each element changes according to the positional relationship with the row of teeth. Semiconductor magnetoresistive elements MR1-MR4 close to a magnetic pole of a field magnet 1 are used as the impedance element. The array interval of each pair of semiconductor magnetoresistive elements (MR1-MR3, MR2-MR4) connected electrically in series corresponds to a half of a gear pitch. A pair of array of the semiconductor magnetoresistive element and an adjoining pair of array are in the relationship of mutual interpolation. COPYRIGHT: (C)2004,JPO&NCIPI
|
