| 摘要 |
PURPOSE: A ceramic electrostatic chuck with a mesh electrode is provided to increase heat transfer efficiency and reduce an error rate of a wafer fabricating process by fabricating a thin electrode of 20-50 micrometer in a ceramic insulator. CONSTITUTION: A lower insulator(200) which has been firstly sintered is prepared. A through hole is formed in a part of the lower insulator. A mesh electrode(220) is stacked on the lower insulator. An upper insulator is stacked on the electrode-stacked lower insulator. The structure with the lower insulator, the mesh electrode and the upper insulator is secondly sintered. Paste or a conductive material is filled in the through hole formed in the sintered structure. A part of the mesh electrode passes through the through hole formed in the lower insulator and is bent to extend downward, contacting the side surface of the through hole. The paste or the conductive material maintains the electrical contact state with the mesh electrode.
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