| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a laser beam machining device of a simultaneous multibeam machining type by which the pitch spacing in linear working can be adjusted easily and correctly with the diameter of a condensing beam kept constant. <P>SOLUTION: In the laser beam machining device which divides a single laser beam 12 into a plurality of laser beams 12a using a diffractive optical element or a combination of a diffractive optical element 3 and a condensing lens 5, collects lights, moves laser beams and a workpiece 17 relatively and performs a plurality of the linear working simultaneously with a plurality of laser beams, it is so composed that the diffractive optical element is rotated around an optical axis and the pitch spacing of a working line is adjusted by controlling the rotation angle. <P>COPYRIGHT: (C)2004,JPO&NCIPI</p> |
