| 摘要 |
PROBLEM TO BE SOLVED: To prevent the generation of a spot by removing a liquid residue by dispersing a suction in a substrate holding section. SOLUTION: Waterdrops are dispersed widely in the direction along the outer periphery of a substrate W more than a suction from one suction hole and are sucked as seen in a conventional example by the suction from the suction holes 71d through a porous member 73, and gas for a drying is sucked. Accordingly, waterdrops are sucked not only in the lower edge section of the substrate W positioned just above the suction holes 71d, but also in the arcuate sections R of the substrate W positioned on both outsides, and the gas is sucked sufficiently. Consequently, both outsides R at the lower edge of the substrate W are also dried sufficiently, and the generation of the spot resulting from the liquid residue is prevented. COPYRIGHT: (C)2004,JPO&NCIPI
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