SUBSTRATE PROCESSOR

摘要

PROBLEM TO BE SOLVED: To provide a highly reliable substrate processor capable of supplying a processing liquid from the outside of a processing room to a processing liquid supply tool in the processing room, while preventing the leakage of the processing liquid and atmosphere from the processing room and capable of transmitting rotation force from the outside of the processing room to the processing liquid supply tool in the processing room. SOLUTION: A plurality of shower pipes 6 are arranged in the processing room 1 horizontally at equal intervals so as to be extended in the X direction. One end of each shower pipe 6 is connected to a rotary joint 8. Respective rotary joints 8 are connected to a processing liquid pipe 9. The pipe 9 is taken out to the outside through a sidewall 1b. A gap between the pipe 9 and the sidewall 1b is sealed by a sealing material or adhesive. A magnet disk 5 is attached to the other end of each shower pipe 6. Magnet disks 4 are respectively arranged so as to be opposed to respective magnet disks 5 through a sidewall 1a. COPYRIGHT: (C)2004,JPO&NCIPI