| 摘要 |
PROBLEM TO BE SOLVED: To provide a cleaning method suppressing the corrosion of an outlet port side pipeline component for a semiconductor manufacturing equipment. SOLUTION: The cleaning method includes the step of introducing a cleaning gas containing fluorine so as to be conducted to flow from the upstream of a reaction chamber 10 to the side of the outlet port pipeline 31, and flowing corrosion-resistant gas reacting against the fluorine from an introducing point at the side of outlet port pipeline 31 of the reaction chamber 10. COPYRIGHT: (C)2004,JPO&NCIPI
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