Semiconductor device having multilayer interconnection structure and method for manufacturing the device

摘要

A semiconductor device having a multilayer interconnection structure includes a chip semiconductor substrate, a plurality of interlayer insulating layers disposed on the chip semiconductor substrate, a circuit section disposed on the chip semiconductor substrate, and a plurality of walls that extend through the interlayer insulating layers and are arranged along the peripheral portions of the chip semiconductor substrate such that the walls surround the circuit section. The walls include upper sub-walls and lower sub-walls. The upper sub-walls extend through one of the interlayer insulating layers and further extend into another one of the interlayer insulating layers disposed under the layer through which the upper sub-walls extend. The lower sub-walls extend through one of the interlayer insulating layers disposed under the layer through which the upper sub-walls extend. Lower portions of the upper sub-walls each extend into corresponding upper portions of the lower sub-walls.