Pressure sensor having metallic diaphragm with convexity

摘要

A pressure sensor includes a diaphragm for sealing liquid. The diaphragm includes a plurality of convexities, which are disposed concentrically on the diaphragm. Each convexity has a circular arc cross-section in a radial direction and has a ring shape. The sensor has a configuration factor. The configuration factor is in a range between 2.5 and 3.5. The diaphragm of the sensor has excellent deformability so that detection error of the sensor is reduced.