发明名称 Method of fabricating L10 ordered fePt or FePtX thin film with (001) orientation
摘要 Methods are provided for producing L10 ordered FePt or FePtX (where X=C, Cr, Zr, Cu, Ta, SiO2, MgO, Al2O3, B2O3 or B) thin film with (001) orientation for use in perpendicular magnetic recording media. The methods use strain-induced phase transformation from FCC to FCT. A chromium alloy (CrA) underlayer, where A=Ru, Mo, Mn, W, Ti, Zr or V with (002) preferred orientation is deposited first on any of a variety of disk substrates such as NiP-coated AlMg, glass, glass-ceramic, or glassy carbon. A seed layer such as Ta, NiAl, or C is preferably pre-deposited on the disk substrate. An intermediate layer is deposited on the CrA underlayer to decrease the thickness of an initial growth layer before a FePt or a FePtX film with a (001) texture is deposited on the intermediate layer. These methods produce thin films particularly suitable for recording media with ultrahigh recording densities.
申请公布号 US2004191578(A1) 申请公布日期 2004.09.30
申请号 US20030395827 申请日期 2003.03.24
申请人 CHEN JINGSHENG;XU YINGFAN;WANG JIAN PING 发明人 CHEN JINGSHENG;XU YINGFAN;WANG JIAN PING
分类号 G11B5/64;G11B5/73;G11B5/84;(IPC1-7):G11B5/70 主分类号 G11B5/64
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