发明名称 |
Wafer edge exposing apparatus |
摘要 |
A wafer edge exposing apparatus comprising: a light source device for generating source light; an optical fiber cord for guiding the source light generated from the light source into a light focusing device; a lens, positioned in the light focusing device to receive the source light from the optical fiber cord, the light focusing device to focus the source light to the edge of a wafer; and a wavelength converter for converting a wavelength of the source light to a wavelength corresponding to the highest absorptivity of a photoacid generator of resist coated on the wafer.
|
申请公布号 |
US2004189971(A1) |
申请公布日期 |
2004.09.30 |
申请号 |
US20040807659 |
申请日期 |
2004.03.24 |
申请人 |
SAMSUNG ELECTRONICS CO., LTD. |
发明人 |
GOO DOO-HOON;LEE SI-HYEUNG |
分类号 |
G03B27/54;G03F7/20;H01L21/027;(IPC1-7):G03B27/54 |
主分类号 |
G03B27/54 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|