| 摘要 |
A hot plate unit (1) having a reduced heater temperature rise time and not generating dusts. The hot plate unit comprises a casing (2) having an opening portion; a heater (3) arranged on the opening portion and including a plate-shaped member (9) made from ceramics and a heat generating element (10) arranged on the plate-shaped member; and a radiant heat reflecting member (4) interposed between the casing and the heater. <IMAGE> |
