Mems variable inductor and capacitor

摘要

A variable passive component (10) is provided for fabrication on a microelectromechanical system (MEMS) device. A conductive portion (16) is provided on a low-profile sliding dielectric sheet (18) that cooperates with a conductive portion (14) disposed on a substrate (12) to provide a variable passive component. The passive component can be a variable inductor provided by moving a shorted spiral inductor formed on the dielectric sheet over a spiral inductor on the substrate with varying degrees of overlap causing varying inductance values. The passive component can be a variable capacitor that consists of a large conductive pad on a dielectric plate which slides over two adjacent pads on the substrate with varying overlap causing varying capacitance values.