发明名称 Spatial light modulator
摘要 A modulator formed with a solid state electro-optic material having a pixellated structure interconnected to a circuit on a semiconductor substrate.Silicon CMOS integrated circuit that can include random access memories (RAMs) are used as a substrate and interfaced to solid state electro-optic materials coated thereon. In particular, the electro-optic modulators are controlled by RAM cells to produce a modulation of reflected light. SRAMs can be used with connection to the SRAM cell flip-flop. DRAMs can be used with the modulator replacing the DRAM storage capacitor. The SLM thus formed can be connected to a digital computer and controlled as if were a being written to as a memory, but other IC structures can also be used. In order to enhance the modulation effects, the electro-optic material is used as the spacer for a Fabry-Perot etalon structure that is also deposited on the semiconductor substrate. PLZT is a suitable electro-optic material.
申请公布号 US6798550(B1) 申请公布日期 2004.09.28
申请号 US20000715867 申请日期 2000.11.17
申请人 CORNING APPLIED TECHNOLOGIES CORPORATION 发明人 WANG FEILING;LI KEWEN KEVIN;TSANG DEAN;JIANG HUA
分类号 G02F1/03;G02F1/055;G02F1/21;(IPC1-7):G02F1/03 主分类号 G02F1/03
代理机构 代理人
主权项
地址