发明名称 |
Migration measuring method and measuring apparatus |
摘要 |
A migration measuring method based on an alternating current impedance method, including steps: direct current with fine alternating current superposed is applied across electrodes (1), (2) to measure the impedance there between; and a surface static capacity (c) is calculated from the measured value of impedance in order to measure migration in accordance with the variation of the calculated surface static capacity.
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申请公布号 |
US6798222(B2) |
申请公布日期 |
2004.09.28 |
申请号 |
US20020206974 |
申请日期 |
2002.07.30 |
申请人 |
ESPEC CORPORATION |
发明人 |
TANAKA HIROKAZU;YOSHIHARA SACHIO;SHIRAKASHI TAKASHI;HIRAMATSU HIROAKI;KUMEKAWA KAZUHIRO;UETA FUMITAKA |
分类号 |
G01R31/02;G01N17/02;G01N27/02;G01N27/04;G01N27/22;G01R27/02;(IPC1-7):G01R27/08 |
主分类号 |
G01R31/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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