| 摘要 |
In a gas laser device, a compensation time according to electric charges accumulated in a charging capacitor is calculated and, when the compensation time lapsed from a time when an outer trigger was input, a compensation trigger is output to a semiconductor switch to electrically connect the charging capacitor and a first-stage capacitor, whereby a time between the input of the outer trigger and the occurrence of light emission across discharge electrodes becomes constant in each pulse and a semiconductor substrate can be exposed to light with higher accuracy even when any components of a pulse power source are affected by a temperature change.
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