发明名称 |
Surface treating for micromachining and method for surface treatment |
摘要 |
The present invention provides a micromachining surface treatment material for and a surface treatment method that suppress widening of the diameter of contact holes when removing a natural oxidation layer arising at bottom sections of the contact holes. The micromachining surface treatment material contains less than 0.1% hydrofluoric acid, and more than 40% by weight but less than or equal to 47% by weight of ammonium fluoride. Also, a surfactant is contained therein in an amount from 0.0001 to 0.1% by weight.
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申请公布号 |
US6797194(B1) |
申请公布日期 |
2004.09.28 |
申请号 |
US20000622397 |
申请日期 |
2000.12.01 |
申请人 |
STELLA CHEMIFA KABUSHIKI KAISHA |
发明人 |
KIKUYAMA HIROHISA;MIYASHITA MASAYUKI;YABUNE TATSUHIRO;OHMI TADAHIRO |
分类号 |
H01L21/306;H01L21/311;H01L21/316;H01L21/768;(IPC1-7):C09K13/00 |
主分类号 |
H01L21/306 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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