| 摘要 |
PROBLEM TO BE SOLVED: To provide pressurizing method and device capable of widening the range of output width of a thrust and making the changing rate of the thrust linear through a simple mechanism, pressure bonding method and device for an electronic component as well as the manufacturing method and device for an electro-optical device employing the pressurizing method and device. SOLUTION: A pressurizing mechanism 10 to which a first air cylinder 12, a second air cylinder 14 and a third air cylinder 16 are connected, is provided to control respective air cylinders 12, 14, 16 individually respectively or combining them. COPYRIGHT: (C)2004,JPO&NCIPI
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