VIBRATING PUMPING STAGE FOR MOLECULAR VACUUM PUMP, AND MOLECULAR VACUUM PUMP HAVING VIBRATING PUMPING STAGE

摘要

PROBLEM TO BE SOLVED: To provide a micro electrical machine pumping stage for a vacuum pump and a vacuum pump having one or more such stages. SOLUTION: A micro-electro-mechanical vibrating pumping stage comprises a silicon substrate 15 on which there are formed a single-layer or multilayer oscillating assembly 27; 127; 227; 327 with a vibrating membrane and a device for controlling the membrane in order to provide its oscillation with respect to the substrate. A molecular vacuum pump incorporates this vibrating pumping stage. COPYRIGHT: (C)2004,JPO&NCIPI