| 摘要 |
PROBLEM TO BE SOLVED: To provide a treated material exchange chamber which ensures airtightness of the chamber partitioned into an upper chamber and a lower chamber with a valve. SOLUTION: The treated material exchange chamber 1 comprises an exchange chamber 1c which is provided with a step 2c at an inner wall 2a; a conveyance port 17 for treated materials formed above the step 2c of the inner wall 2a, and a conveying path 5 formed below the step 2c, communicating with a treatment chamber; and the valve 6 which moves up and down holding the treated materials in the exchange chamber 1c, and whose periphery 6a comes into contact at an upper dead end point with the step 2c of the exchange chamber 1c, so as to partition the interior of the exchange chamber 1c into the upper chamber 1a and a lower chamber 1b. A pressing mechanism is provided, so that, when the valve 6 ascends to reach the upper dead point, the periphery 6a of the valve body 6 is pressed against the step 2c through an outer surface of the periphery 6a. COPYRIGHT: (C)2004,JPO&NCIPI
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