FERROELECTRIC CAPACITOR ELEMENT FOR POLARIZATION EVALUATION, AND ITS EVALUATION METHOD

摘要

PROBLEM TO BE SOLVED: To provide the evaluation method of a ferroelectric capacitor element wherein a voltage pulse whose pulse width is at most 10 ns is applied accurately and highly precise polarization evaluation is realized, and to provide an evaluation apparatus. SOLUTION: The lower electrode of a ferroelectric capacitive element 102 is connected to a probing pad 106 via a pn junction diode 103 and connected to a probing pad 107 via a pn junction diode 104. Discharging current of the element 102 is measured by measuring the current flowing in the probing pad 106 while pulse voltage is applied to a probing pad 105. As a result, discharging current is measured by changing the voltage pulse width, and paraelectrics capacitance component and an equivalent for built-in potential of a diode are excluded. COPYRIGHT: (C)2004,JPO&NCIPI