| 摘要 |
PROBLEM TO BE SOLVED: To provide a molecular pump having a safety structure for preventing a housing and an outside casing from being destroyed even when a rotor is damaged during operation in a turbo molecular pump and a composite molecular pump. SOLUTION: In the safety structure of the molecular pump, a sealable cylindrical space part 1d is formed between an inside casing 5 provided in a cylindrical state so as to be externally fitted over an outer peripheral part of a static blade stage 2b of a turbo molecular pump part 2 and the outer peripheral part of an outside stator 3b of a screw groove vacuum pump part 3, and an outside casing 1c f the composite molecular pump 1. Sand-like cushioning material 7 is filled in the space part 1b. COPYRIGHT: (C)2004,JPO&NCIPI
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