| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a laser beam drawing system employing a mirror in which malfunction of the mirror device due to an ultraviolet laser beam is prevented. <P>SOLUTION: Before entering a two-dimensionally arranged micromirrors 108, a laser beam is converted into multibeams by a laser beam converter 107 so that each thin laser beam enters each micromirror accurately. Since the ultraviolet laser beam entering the micromirror through the gap between adjacent micromirrors can be controlled, malfunction of the mirror device can be eliminated. <P>COPYRIGHT: (C)2004,JPO&NCIPI</p> |
