| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an exposing device of a strip-shaped work for setting a mask and a work stage in parallel even if the strip-shaped work in which warp and waviness occur at the periphery section exists on the work stage, and a method for setting the mask and the work stage in parallel. <P>SOLUTION: The exposing device for carrying and exposing the strip-shaped work sequentially comprises the work stage for supporting the strip-shaped work; an interval setting mechanism for setting the inclination of the work stage against the mask in parallel; spacers for setting the intervals between the mask and the work stage; and a mechanism for inserting and retracting the spacers into and from the intervals between the mask and the work stage. A plurality of spacers having equal heights one another are inserted between the mask and the work stage, the mask and the sections not holding the work on the work stage is contacted via the spacers and the inclination of the work stage is aligned with that of the mask and fixed to the mask so that the intervals between the mask and the work stage becomes constant. After that, the pacers are retracted. <P>COPYRIGHT: (C)2004,JPO&NCIPI</p> |
