APPARATUS AND METHOD FOR HEAT-TREATMENT

摘要

PROBLEM TO BE SOLVED: To provide a heat treatment apparatus which can monitor and suppress the deformation of each subject to be heat-treated and a heat treatment method using the same. SOLUTION: The heat treatment apparatus is equipped with a heat treatment furnace 7 which houses the subject X to be heat-treated and a displacement-measuring means 26 which measures the deformation of the subject X. COPYRIGHT: (C)2004,JPO&NCIPI