| 摘要 |
PROBLEM TO BE SOLVED: To obtain a precise semiconductor probing test result, in which the GND (ground) reinforcement for the probe is easily and securely performed by adding a simple modification to the probe card base structure and so forth, which relates to the probe card. SOLUTION: The probe card includes a probe card base 11 forming a plurality of stratified structures; intra-base wiring 13 provided to each stratum; a through-hole 15 for leading out the intra-base wiring 13 to the upper or lower surface of the probe card base 11; a probe 12 provided to a level difference surface 11B of each stratum, extending toward the center of the probe card base 11, and connected to the intra-base wiring 13 via the through-hole 15; and the GND reinforcement part 14 provided on the level difference surface 11B of each stratum and contacting with the probe 12 near the tip thereof. COPYRIGHT: (C)2004,JPO&NCIPI
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