METHOD OF PRODUCING FILM-DEPOSITED BODY, AND FILM-DEPOSITED BODY

摘要

PROBLEM TO BE SOLVED: To more easily produce a film-deposited body in which a metal part and a resin part are formed in an coexistent state, and which is used as a luminous product or the like in a short time. SOLUTION: A base material 8 is arranged inside a vacuum chamber 1, and, film deposition of a metal part and film deposition of a resin part are performed to the base material 8 by vacuum film deposition. the film deposition is performed by a pair of film deposition units 17 and 17' arranged so as to be confronted with a substrate holder 7 holding the base material 8 interposed. The film deposition of the metal part is performed by the film deposition unit 17 and the film deposition of the resin part is performed by the film deposition unit 17' while rotating the base material 8 by the substrate holder 7, and the film deposition of the metal part and the film deposition of the resin part are simultaneously performed. COPYRIGHT: (C)2004,JPO&NCIPI