| 摘要 |
PROBLEM TO BE SOLVED: To provide an apparatus for flushing a mask which can suppress scattering of a washing liquid jetted from washing nozzles as much as possible. SOLUTION: A mask fixing plate 5 for fixing the mask which is an object to be washed under a condition where the mask is stood, and a mask fixing cylinder 4 are provided in the apparatus for flushing the mask. In addition, washing nozzles 6a and 6b are arranged both on the surface side and the back face side of the mask fixed by the plate 5 and the cylinder 4, and jet the washing liquid on these faces, cylinders 9a and 9b for elevating and lowering for moving slidably the washing nozzles 6a and 6b in the up and down direction, and scattering-proof covers 11a and 11b which are arranged in the neighborhood of the washing nozzles 6a and 6b, are elevated and lowered with the washing nozzles 6a and 6b, and are formed in curved sectional shapes, and whose opening parts are arranged by facing to the mask sides, are provided. It is thereby possible to prevent the washing liquid from being scattered and to prevent the washing liquid from sticking on a driving device or the like. COPYRIGHT: (C)2004,JPO&NCIPI
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