EXPOSURE APPARATUS FOR LIQUID CRYSTAL PANEL

摘要

PROBLEM TO BE SOLVED: To provide a lightweight exposure apparatus suitable for the manufacture of a liquid crystal panel.

SOLUTION: A composite ceramic material produced by adding glass to silicon carbide and having a honeycomb structure is used for the mask stage 2 and the substrate stage 12 in the exposure apparatus 100 for a liquid crystal panel. In the exposure apparatus for a liquid crystal panel in which a substrate is exposed so as to transfer the pattern on a mask 1 onto the substrate while at least either the mask 1 or the substrate 5 is moved, a ceramic material having ≤3.0 g/cm3density is used for the material constituting the stage. This results in the exposure apparatus having significantly reduced weight and capable of high accuracy exposure.

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