| 摘要 |
PROBLEM TO BE SOLVED: To solve the problem that, when the interior of an exposing device is made a vacuum, degasing is made from a resin tube in the exposing device, and its degased components adhere and are deposited on a surface of an optical element, to deteriorate the optical performance of the optical element and the exposing device. SOLUTION: The resin tube is provided in the exposing device and the temperature is controlled so that the surface temperature of this resinous tube is kept at a predetermined temperature or below. COPYRIGHT: (C)2004,JPO&NCIPI |
