| 摘要 |
PROBLEM TO BE SOLVED: To provide a micromirror of a small size and high dimensional accuracy and positioning accuracy suitable for use in combination with optical components such as optical fibers, and to provide its manufacturing method. SOLUTION: The micromirror 10 made of metal, such as an Ni-Fe alloy, is equipped with mirror sections 12a and 12b integrated to form an angle part 14A having an internal angleθ, such as 90°, and flat sections 16a and 16b respectively integrated with the mirror sections 12a and 12b in order to support the mirror sections in the projecting state of the angle part 14A on the plane. The flat section 16a is provided with positioning holes 18a and 18c and the flat section 16b with positioning holes 18b and 18d, respectively. The positioning holes may merely be disposed in a plurality in the flat section 16a or 16b or in one or more respectively in the flat sections 16a and 16b. The positioning of the micromirror is performed by fitting the respective positioning holes onto corresponding positioning pins on a packaging substrate. The micromirror 10 can be manufactured with good dimensional accuracy by selective plating treatment. COPYRIGHT: (C)2004,JPO&NCIPI
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