| 摘要 |
PROBLEM TO BE SOLVED: To provide a thin film deposition method and a deposition system therefor where the yield of a plume can be improved by effectively using the plume without any waste, further, even in the case an oxide superconductive thin film with a stacked structure is obtained, a film deposition process can be reduced, and the reduction of the production cost can be attained. SOLUTION: In the method of depositing a thin film, laser beams 8a to 8c are applied to the surface of a target 7, the constituting grains of the target 7 are beaten out or evaporated to generate a plume 55, a thin film stacked body 34 is passed into the plume 55 for a plurality of times, and the constituting grains comprised in the plume 55 are deposited on the thin film stacked body 34 per pass, so that an oxide superconductive thin film with a stacked structure is deposited on the thin film-stacked body 34. COPYRIGHT: (C)2004,JPO&NCIPI
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